Séminaires et colloques
THz radiation application study at Institute of Applied Physics
by
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Europe/Paris
Amphitéatre (LPSC)
Amphitéatre
LPSC
Description
Perspectives of the terahertz discharge plasma applications are considered, in particularly the perspectives of the terahertz plasma as the source of EUV (13.5 nm) radiation.
Plasma light emission ability is evaluated. It was shown that for 1 kW 13.5 nm power from 1 mm3 volume plasma electron density had to be not less then 1015 cm-3 for tin ions.
Results of the first experiments aimed on the dense plasma creation by the terahertz radiation are presented. It was shown that in the high pressure discharge it was possible to create plasma with density close to 1015 cm-3. Future experiments aimed on the low pressure discharge plasma creation are discussed.